Plasma-Therm

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Phone727x-577x-4999
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10050 16th Street North
St. Petersburg, Florida 33716
United States
 
Plasma-Therm
 
ABOUT

Since 1974, Plasma-Therm has offered plasma etch and deposition solutions for specialty applications. All Plasma-Therm systems, from Apex™ to VERSALNE®, Singulator® to Pinnacle™ to Vision™, provide highly accurate, repeatable results. A wide range of material handling options, including load lock and cassette load modules, match Plasma-Therm systems to varied capacity requirements, from R&D labs to high-volume manufacturing.

Plasma-Therm collaborates with strategic partners such as DISCO for the Advanced Packaging market and memsstar (ORBIS™ platform) for dry release of MEMS devices.

All Plasma-Therm products are supported by award-winning service and support that ensures high uptime and consistent process results. Our customer-focused approach has been recognized with awards in the VLSIresearch Customer Satisfaction Survey every year since 2000.


Plasma-Therm's expertise in plasma processing technologies makes it the preferred supplier to major manufacturers and research institutions in all technology markets.Plasma-Therm products and technologies serve varied markets, including:

  • MEMS/NEMS
  • Solid-state lighting
  • Wireless Photomask
  • Nanotechnology
  • Renewable energy
  • Data storage
  • Photonics
  • R&D
  • Die singulation/Mid-End-of-Line packaging


Since 1974, Plasma-Therm has offered plasma etch and deposition solutions for specialty applications. All Plasma-Therm systems, from Apex™ to VERSALNE®, Singulator® to Pinnacle™ to Vision™, provide highly accurate, repeatable results. A wide range of material handling options, including load lock and cassette load modules, match Plasma-Therm systems to varied capacity requirements, from R&D labs to high-volume manufacturing.

All Plasma-Therm products are supported by award-winning service and support that ensures high uptime and consistent process results. Our customer-focused approach has been recognized with awards in the VLSIresearch Customer Satisfaction Survey every year since 2000.


SYSTEMS

  • Apex SLR™ - ICP etch systems
  • VERSALINE® - modular cluster systems
  • Vision™ series - RIE, PECVD
  • LAPECVD™ - large-area PECVD
  • Pinnacle™ - ion beam systems
  • Versalock™ - etch and deposition systems
  • Mask Etcher® - photo mask etch
  • Singulator™ - plasma dicing-on-tape
  • Odyssey HDRF™ - low-temperature strip/clean
  • ORBIS™ Platform - dry release

  • Process control with EndpointWorks®
  • Productivity enhancements

Plasma-Therm produces plasma etch, deposition, and singulation tools, including ICP, RIE, DSE™, IBE, IBD, PECVD, HDPCVD, and HDRF™.

Global Sales & Service

 
Visit our website: plasmatherm.com/
 
Plasma-Therm | 10050 16th Street North St. Petersburg, Florida 33716 United States | 727x-577x-4999
 
 
 
 
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