SPTS Technologies

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Phone+44 1633 414000
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Ringland Way
Newport, Gwent NP18 2TA
SPTS Technologies

SPTS Technologies, an Orbotech company, is a leading supplier of etch and deposition process solutions and equipment for the global semiconductor and microelectronic device manufacturing industries.

We provide advanced wafer processing solutions to the world's leading semiconductor device manufacturers and research institutions, and our end-market applications include Advanced Packaging, MEMS, high speed RF IC, power semiconductor devices and LED manufacturing.

We understand the needs of volume manufacturers producing the devices of today, and the developers of tomorrow's technologies. Our product and technical teams work hard to push the boundaries of all these key processes which contribute to the manufacturing and commercial success of a wide variety of semiconductor and micro-electronic devices. We make electronics possible.

Available on a range of wafer handling platforms, SPTS supplies etch and deposition wafer processing systems for volume production, R&D or pilot production environments. Served markets include Advanced Packaging, MEMS, LEDs, Power Semiconductors, and High Speed RF-ICs.

Technologies and Process Solutions offered include:

Single Wafer Platforms

SPTS's ICP, DRIE, PECVD, PVD and MOCVD modules are available on 3 wafer handling platforms:

  • fxP® - 100 to 300mm wafer size. Supports Etch, PVD, PECVD, MOCVD and HF Release modules
  • c2L® - 3" to 200mm wafer size. Supports Etch, PVD, PECVD, MOCVD and HF Release modules
  • LPX - 3" to 200mm wafer size. Supports Etch & PECVD modules only

Click here for more information

Visit our website: www.spts.com/
SPTS Technologies | Ringland Way Newport, Gwent NP18 2TA UK | +44 1633 414000
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